Siemens has officially announced its acquisition of Canopus AI, a rising innovator in computational and AI-driven metrology solutions. With this strategic move, Siemens aims to help semiconductor manufacturers reach new levels of accuracy and efficiency in wafer and mask inspection processes. Moreover, this acquisition strengthens Siemens’ role in the global semiconductor manufacturing ecosystem by expanding its semiconductor design and manufacturing digital thread with advanced metrology technologies powered by artificial intelligence.
As the semiconductor industry continues to evolve, manufacturers are facing increasingly complex production demands. Device geometries are shrinking rapidly, while production volumes are scaling higher than ever before. Therefore, massive metrology has become essential for ensuring quality, improving yield, and maintaining precision across advanced fabrication processes. In this context, Canopus AI’s intelligent inspection and measurement solutions fit seamlessly into Siemens’ existing portfolio, enabling manufacturers to drive stronger operational performance.
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“The acquisition of Canopus AI exemplifies Siemens’ commitment to leveraging industrial AI to solve critical challenges in semiconductor manufacturing,” said Tony Hemmelgarn, president and CEO, Siemens Digital Industry Software. “By combining the computational lithography and manufacturing physics simulation capability in our Calibre portfolio with Canopus-AI’s advanced metrology and inspection technologies, we are creating a differentiated, end-to-end EDA digital thread that improves the fidelity of printed wafer patterns, accelerates yield ramp and reduces time-to-volume for advanced nodes. This integration further advances our vision of a comprehensive, high-accuracy, semiconductor manufacturing digital twin, enabling sub-nanometer process control and mask development.”
Founded in 2021 and headquartered in Grenoble, France, Canopus AI has quickly emerged as a fast-growing AI software company focused on transforming wafer and mask metrology. In addition, the company is pioneering a revolutionary concept known as “Metrospection,” which enhances metrology and inspection workflows through AI. By bridging traditional wafer measurement methods with modern inspection frameworks, Canopus AI helps chip designers meet the extreme precision requirements demanded by next-generation technology nodes.
“We are delighted to join Siemens and bring the power of AI-enabled metrology in the semiconductor industry to a broader audience as part of Siemens’ EDA community of users,” said Joël Alanis, chief executive officer, Canopus AI. “Together, we’ll empower innovators pushing the boundaries of semiconductor design and manufacturing with robust wafer and mask metrology and inspection and help them to meet the challenges of the rapidly changing semiconductor industry.”
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The acquisition transaction officially closed on January 12, 2026. Consequently, Siemens is now positioned to further accelerate innovation in semiconductor manufacturing by integrating Canopus AI’s metrology expertise into its broader Siemens Xcelerator platform and digital twin strategy.
Siemens Digital Industries Software continues to support organizations worldwide through its software, hardware, and services, enabling digital transformation across industries. From chips to full-scale systems, Siemens remains committed to accelerating sustainable product development and manufacturing excellence.
This acquisition highlights Siemens’ ongoing investment in industrial AI solutions, ensuring semiconductor manufacturers can meet the rapidly growing demands of precision, yield improvement, and advanced process control in the years ahead.
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